JPH0243866Y2 - - Google Patents
Info
- Publication number
- JPH0243866Y2 JPH0243866Y2 JP6765284U JP6765284U JPH0243866Y2 JP H0243866 Y2 JPH0243866 Y2 JP H0243866Y2 JP 6765284 U JP6765284 U JP 6765284U JP 6765284 U JP6765284 U JP 6765284U JP H0243866 Y2 JPH0243866 Y2 JP H0243866Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic poles
- electron
- magnetic field
- electron beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 76
- 238000010894 electron beam technology Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000003302 ferromagnetic material Substances 0.000 claims description 4
- 230000005284 excitation Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6765284U JPS60181366U (ja) | 1984-05-09 | 1984-05-09 | 複数の電子ビ−ムにより材料を加熱する装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6765284U JPS60181366U (ja) | 1984-05-09 | 1984-05-09 | 複数の電子ビ−ムにより材料を加熱する装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60181366U JPS60181366U (ja) | 1985-12-02 |
| JPH0243866Y2 true JPH0243866Y2 (en]) | 1990-11-21 |
Family
ID=30601670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6765284U Granted JPS60181366U (ja) | 1984-05-09 | 1984-05-09 | 複数の電子ビ−ムにより材料を加熱する装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60181366U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01149955A (ja) * | 1987-12-07 | 1989-06-13 | Anelva Corp | 薄膜製造装置 |
-
1984
- 1984-05-09 JP JP6765284U patent/JPS60181366U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60181366U (ja) | 1985-12-02 |
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